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Contact (User Office)
Karlsruhe Nano Micro Facility
KIT-Campus North
H.-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen, Germany
phone: +49(721)608-23123
DRIE partly not available
June 2020
Due to a major reconstruction of the Dry Etching Cluster (DRIE) the RIBE option is currently not available. Accepted projects are delayed or may be cancelled. Please contact the DRIE experts before you submit a new proposal.
Version 5.7.0
"Pluto"
