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Karlsruhe Nano Micro Facility
KIT-Campus North

Building 440

H.-von-Helmholtz-Platz 1

76344 Eggenstein-Leopoldshafen, Germany


phone: +49(721)608-23123

knmf-userofficeUec6∂kit edu

User Office

KNMF Profile

DRIE partly not available

June 2020

Due to a major reconstruction of the Dry Etching Cluster (DRIE) the RIBE option is currently not available. Accepted projects are delayed or may be cancelled. Please contact the DRIE experts before you submit a new proposal.

Deadline: January 15, 2021, 23:59:59 CET
25th call open

Submit your proposal

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KNMF is funded by the Helmholtz Association